分批式净化系统

CBS分批式净化系统

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2023-09-28 18:11:42
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安捷来国际股份（香港）有限公司

安捷来国际股份（香港）有限公司

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产品简介

分批式净化系统：Theoriginalsealedstructurehasenabledtheatmosphericprocess

详细介绍

分批式净化系统：

  • The original sealed structure has enabled the atmospheric process.
  • With the ultra high HEPA filter adopted,the maximum available temperature at 500℃ has been achieved.
  • Cycle time reduction is possible by oven rapid cooling system and/or speedy substrate-transfer.
Available glass size ~W730×L920mm
Temperature range80~500℃
Temperature uniformity±5℃
CleanlinessClass 10 (0.3μm)
Applications A wide variety of Annealing of LTPS & TFT
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