SMC真空发生器组件ZM系列

都装在一起
zui大吸入流量增加40%
zui高真空度84kPa
内置真空过滤器、消声器。
真空发生器用空气供给阀
真空破坏阀(带流量调整阀)
真空用压力开关(电子式、膜片式)
配管、配线、指示、调整功能都不在侧面，
故能组装成集装式，便于维修。
EXH方式－共通
SUP方式－共通、各自
由于是2段扩压管构造，吸入流量增加40%。

SMC真空发生器组件ZM系列

ZM050H-0
ZM051AH-K5LZE15
ZM051H
ZM051H-J5GB
ZM051H-J5LZB
ZM051H-K5GB
ZM051H-K5GB-E15
ZM051H-K5GBE15L
ZM051H-K5GB-M15
ZM051H-K5LB
ZM051H-K5LB-E15
ZM051H-K5L-E14C
ZM051HK5LOZB111
ZM051H-K5LZ
ZM051H-K5LZB
ZM051H-K5LZBE15
ZM051HK5LZBE15L
ZM051HK5LZBE55L
ZM051HK5LZBM21L
ZM051HK5LZBX111
ZM051H-K5LZ-E15
ZM051H-K5LZ-M15
ZM051H-K5LZM21L
ZM051H-P5
ZM051H-Q5
ZM051M-K5LZBE15
ZM051SH-J5LO
ZM051SH-K5G
ZM051SH-K5LE15L
ZM051SH-K5LX107
ZM051SH-K5LZ
ZM051SHK5LZBE15
ZM051SHK5LZE15L
ZM051SHKY5LZE16
ZM052H
ZM053AH-K5G
ZM053AH-K5LZ
ZM053AH-KVG
ZM053H-J5LB-E15
ZM053H-K5GB-E15
ZM053H-K5L
ZM053H-K5LB-E15
ZM053H-K5LZBE15
ZM053HK5LZBE15L
ZM053H-K5LZBM21
ZM055H-J5LZBM21
ZM055H-K5LZ-E15
ZM071AH-JY5LOB
ZM071AHJY5LOBE1
ZM071AH-K5LZE15
ZM071AHKY5LOBE1
ZM071HFJ5LOZE55
ZM071H-J5GB
ZM071H-J5GB-E15
ZM071HJ5LZBE15L
ZM071HJ5LZBX111
ZM071H-K15LZE15
ZM071H-K5GB
ZM071H-K5GB-E15
ZM071H-K5GBE15L
ZM071H-K5G-E15L
ZM071H-K5LB
ZM071H-K5LB-E15
ZM071H-K5L-E14L
ZM071H-K5L-E15
ZM071H-K5LZ
ZM071H-K5LZB
ZM071H-K5LZBE15
ZM071HK5LZBE15L
ZM071H-K5LZBM21
ZM071HK5LZE14CL
ZM071H-K5LZE14L
ZM071H-K5LZ-E15
ZM071H-K5LZE15L
ZM071H-K5LZ-M21
ZM071HKY5LZBE15
ZM071M-J5LZ
ZM071MJ5LZBM15L
ZM071M-K1LZ-E17
ZM071M-K5LZ
ZM071M-K5LZB
ZM071M-K5LZBE15
ZM071M-K5LZE15L
ZM071SAHJ5LZ15L
ZM071SAHJ5LZE15
ZM071SAH-K5L
ZM071SAH-K5LE15
ZM071SAHK5LE15L
ZM071SAH-K5LO
ZM071SAH-K5LZ
ZM071SAH-K5LZB
ZM071SAHK5LZBE1
ZM071SAHK5LZBE5
ZM071SAHK5LZE15
ZM071SAHK5LZE1L
ZM071SAH-KSLZB
ZM071SAHKSLZBE1
ZM071SAHKSLZBE5
ZM071SH-J5LE15L
ZM071SH-K5G-E15
ZM071SH-K5GE16L
ZM071SH-K5LZB
ZM071SHK5LZBE14
ZM071SHK5LZE15L
ZM071SHK5LZE16C
ZM071SM-J5LZ
ZM071SM-K5LZ
ZM072AH
ZM072H
ZM072H-E15
ZM072SH
ZM073AH-K5LZ
ZM073AH-K5LZB
ZM073AHK5LZB163
ZM073AHK5LZBE15
ZM073AH-K5LZE15
ZM073AH-KY5LZ
ZM073AMK5LZE15C
ZM073AMKY5LOZ10
ZM073H-J3L
ZM073HJ5LOZE55C
ZM073H-J5LZB
ZM073H-K5GB
ZM073H-K5GB-E15
ZM073H-K5GBE15L
ZM073H-K5LB-E15
ZM073H-K5LB-M21
ZM073HK5LOZE55C
ZM073H-K5LZB
ZM073H-K5LZBE15
ZM073HK5LZBE55C
ZM073H-K5LZ-E15
ZM073H-K5LZE15C
ZM073M-J3L
ZM073M-K5GB
ZM073M-K5GB-M21
ZM073M-K5G-M21
ZM073MK5LOZX126
ZM073M-K5LZ
ZM073M-K5LZE15L
ZM073M-K5LZX126
ZM074M
ZM07SAH-K5LE15L
ZM100H-0
ZM101AH-K5G-E15
ZM101H
ZM101H-A5G-E15L
ZM101H-B3LZM21C
ZM101H-B3LZM21L
ZM101H-B5G
ZM101H-J5G
ZM101H-J5GB-E15
ZM101H-J5L
ZM101H-J5LB
ZM101H-J5LB-E15
ZM101H-J5LZ
ZM101H-J5LZB
ZM101H-J5LZBE15
ZM101H-J5LZ-E15
ZM101H-J5LZE15L
ZM101H-J5LZX111
ZM101H-J6LB
ZM101HK15LOX225
ZM101H-K1LZ
ZM101H-K1LZB
ZM101H-K3LB-M21
ZM101H-K3LZE15C
ZM101H-K5GB
ZM101H-K5GB-E15
ZM101H-K5GBE15L
ZM101H-K5GB-M21
ZM101H-K5G-E15
ZM101H-K5L
ZM101H-K5LB
ZM101H-K5LB-E15
ZM101H-K5LB-M21
ZM101H-K5L-E15
ZM101H-K5LOX225
ZM101HK5LOZE14C
ZM101HK5LOZX225
ZM101H-K5L-X225
ZM101H-K5LZ
ZM101H-K5LZB
ZM101H-K5LZBE14
ZM101H-K5LZBE15
ZM101HK5LZBE15C
ZM101HK5LZBE15L
ZM101H-K5LZBE55
ZM101HK5LZBE55L
ZM101H-K5LZBM15
ZM101HK5LZBM15L
ZM101H-K5LZBM21
ZM101HK5LZBM21L
ZM101HK5LZBX111
ZM101H-K5LZ-E14
ZM101H-K5LZ-E15
ZM101H-K5LZE55L
ZM101H-K6LZBE15
ZM101HK6LZBE15C
ZM101H-K6LZBE55
ZM101H-K6LZE15L
ZM101H-KD3LBM21
ZM101HT-K5G-E15
ZM101HT-K5LZ
ZM101M-A5G
ZM101M-A5GBE15L
ZM101M-A5G-E15
ZM101MA5GE15247
ZM101MA5LZBE15L
ZM101MB5LZBE15L
ZM101M-J5LZ-E15
ZM101M-K5LZ
ZM101M-K5LZB
ZM101MK5LZBE15L
ZM101M-K5LZ-E15
ZM101M-K5LZ-M15
ZM101MKY5LZX142
ZM101M-Q5
ZM101SAHB5LBE19
ZM101SAH-K5LE15
ZM101SAH-K5LN
ZM101SAH-K5LZ
ZM101SAHK5LZ15L
ZM101SAH-K5LZB
ZM101SAHK5LZB15
ZM101SAHK5LZE15
ZM101SAHK5LZE1L
ZM101SAHK6LZE15
ZM101SAMKY5LZE1
ZM101SH-J1L
ZM101SH-J1LE15L
ZM101SH-J5G
ZM101SH-J5LZ
ZM101SH-K5GM15L
ZM101SH-K5LZ
ZM101SH-K5LZB
ZM101SHK5LZBE15
ZM101SHK5LZE15L
ZM101SH-K5LZE55
ZM101SHKY5LZBE1
ZM101SM-K5LZB
ZM101SM-K5LZB-L
ZM102AH
ZM102H
ZM102H-E14
ZM102H-E15
ZM102H-E15L
ZM102H-M21
ZM102H-X10
ZM103AH-B5GE15C
ZM103AH-K15LZ
ZM103AHK5LOZB27
ZM103AH-K5LZ
ZM103AHK5LZB15C
ZM103AHK5LZBE15
ZM103AM-K5LZ
ZM103H-J5LZ
ZM103H-J5LZB
ZM103HJ5LZBE15C
ZM103HJ5LZE15CL
ZM103H-K1LB-E15
ZM103H-K5GB
ZM103H-K5GB-E15
ZM103H-K5L
ZM103H-K5LB-E15
ZM103H-K5LBE15L
ZM103H-K5L-E15L
ZM103HK5LOZB143
ZM103HK5LOZBM15
ZM103HK5LOZE55L
ZM103H-K5LZ
ZM103H-K5LZB
ZM103H-K5LZBE15
ZM103HK5LZBE15C
ZM103HK5LZBE15L
ZM103HK5LZBE17C
ZM103HK5LZBE55L
ZM103H-K5LZBM21
ZM103HK5LZE15CN
ZM103H-K5LZE15L
ZM103H-K5LZ-M21
ZM103MJ5LNZX135
ZM103M-K5LZ-E15
ZM103M-K5LZE15L
ZM103M-Q5-X107
ZM103SAHK5LZBE1
ZM103SH-K5LZ
ZM104H-X10
ZM104H-X128
ZM105AH-K5LN
ZM105AH-K5LZE16
ZM105H-K5GBE15L
ZM1073M-K15L-F2
ZM1103MK25LOBD3
ZM1103MK25LOBEA
ZM121H-J5G
ZM121HK4GE15108
ZM121M-J15LZE15
ZM121M-J5LZ-E15
ZM121M-K15LZE15
ZM121M-K5LZ-E15
ZM122H
ZM122H-E15
ZM122H-M21
ZM131AHJ5LOZ111
ZM131H
ZM131H-A5LZB
ZM131H-B1LB-M21
ZM131HB5LZE15L2
ZM131H-B5LZE55C
ZM131HFK5LOZE55
ZM131HF-K5LZE15
ZM131HFK5LZE55C
ZM131H-J5GB
ZM131H-J5GB-E15
ZM131H-J5GBE15L
ZM131H-J5GB-M21
ZM131H-J5G-E15
ZM131H-J5L
ZM131H-J5LB
ZM131H-J5LB-M21
ZM131H-J5L-E15L
ZM131HJ5LOZX111
ZM131H-J5LZ
ZM131H-J5LZB
ZM131H-J5LZBE15
ZM131HJ5LZBE55L
ZM131HJ5LZBM21L
ZM131HJ5LZBX111
ZM131H-J5LZX111
ZM131H-K15LZE15
ZM131H-K1G-M21
ZM131H-K1L-M21
ZM131H-K5GB
ZM131H-K5GB-E15
ZM131HK5GBE1519
ZM131H-K5GBE15L
ZM131HK5GBE15X1
ZM131H-K5GB-E55
ZM131H-K5GB-M21
ZM131H-K5G-E15
ZM131H-K5G-E15L
ZM131HK5GE15L12
ZM131H-K5G-X126
ZM131H-K5L
ZM131H-K5LB
ZM131H-K5LB-E15
ZM131H-K5LBE15L
ZM131H-K5L-E14L
ZM131H-K5L-E15L
ZM131H-K5LN
ZM131H-K5LZ
ZM131H-K5LZB
ZM131HK5LZBE14C
ZM131H-K5LZBE15
ZM131HK5LZBE15C
ZM131HK5LZBE15L
ZM131H-K5LZBE18
ZM131HK5LZBE55L
ZM131H-K5LZBECL
ZM131H-K5LZBM15
ZM131H-K5LZBM21
ZM131H-K5LZ-E14
ZM131H-K5LZE14L
ZM131H-K5LZ-E15
ZM131H-K5LZE15C
ZM131HK5LZE15CL
ZM131H-K5LZE15L
ZM131HK5LZE15L1
ZM131H-K5LZ-E55
ZM131HK5LZE55CL
ZM131HK5LZLX126
ZM131H-K5LZ-M15
ZM131H-K5LZX111
ZM131H-K5LZX126
ZM131H-KY5GBE15
ZM131H-KY5LZE17
ZM131H-Q5
ZM131H-Q5-E15L
ZM131HQ5E15L220
ZM131HT-K5G-E15
ZM131HTK5LZE55C
ZM131M-A5G
ZM131M-A5G-X273
ZM131M-B1LZ
ZM131MFK5LOZE55
ZM131MHJ5LOZ111
ZM131M-J5LZ-E15
ZM131M-J5LZE15C
ZM131M-J5LZE15L
ZM131M-J5LZX111
ZM131M-K5GB-E15
ZM131M-K5GB-M21
ZM131M-K5LB
ZM131M-K5L-E14L
ZM131MK5LOZE55C
ZM131MK5LOZX126
ZM131M-K5LZ
ZM131M-K5LZB
ZM131M-K5LZBE15
ZM131M-K5LZ-E15
ZM131M-K5LZE55L
ZM131M-K5LZM15L
ZM131M-K5LZX111
ZM131M-KY5LOB
ZM131MT-K5LZ
ZM131MT-K5LZE15
ZM131SAH-K5LZ
ZM131SAH-K5LZB
ZM131SAHK5LZBE1
ZM131SAH-K5LZE1
ZM131SAHK5LZE15
ZM131SAHK5LZE19
ZM131SAH-KY5LZ
ZM131SAHKY5LZB1
ZM131SHB5LZE14C
ZM131SH-J5G
ZM131SH-J5HZ
ZM131SHJ5LZE15L
ZM131SH-K5G
ZM131SH-K5GE15L
ZM131SH-K5LZ
ZM131SH-K5LZB
ZM131SH-K5LZE15
ZM131SHKY5LZBE1
ZM132H
ZM132H-E15
ZM132H-E15L
ZM132H-M21
ZM132H-M21L
ZM132M
ZM132M-A5G
ZM132SH
ZM133AHK5LB15CL
ZM133AHK5LBE15C
ZM133H-J5G
ZM133H-J5GB
ZM133H-J5LB
ZM133H-J5LB-E15
ZM133H-J5LZ
ZM133H-J5LZB
ZM133HJ5LZBE15L
ZM133H-J5LZ-E15
ZM133HK15LZBE15
ZM133H-K5G
ZM133H-K5GB
ZM133H-K5GB-E15
ZM133H-K5G-X126
ZM133H-K5LB
ZM133H-K5LB-E15
ZM133H-K5LZ
ZM133H-K5LZB
ZM133H-K5LZBE15
ZM133HK5LZBE15L
ZM133H-K5LZBM15
ZM133H-K5LZ-E15
ZM133H-K5LZE15L
ZM133M-J5LZBE14
ZM133MK5LZBM15L
ZM133M-Q5-X107
ZM134H
ZM134H-E15
ZM134H-E15L
ZM134H-M15L
ZM134M
ZM135H-B5LZ
ZM135H-B5LZX103
ZM135H-J5LZX103
ZM135H-J5LZX130
ZM135HK5LZBE15L
ZM135H-KY5LZ
ZM135H-KY5LZ-L
ZM151HK5LZBX111
ZM151S-K5LZE15L
ZM151SK5LZE15L1
ZM153S-K5LZE15L
ZM153SK5LZE15L1
ZM155S-K5LZ-E15
ZMA053H-K5-T14C
ZMA071H-K5-T14C
ZMA071H-K5T14CL
ZMA101H-K5T14CL
ZMA103HTK5T54CL
ZMA115S-K5T14CL
ZMA131H-K5-T14C
ZMA155S-K5T14CL
ZMA31HNHRBN52HP
ZMA-PV2-0
ZMA-T14CN
ZM-CV
ZM-FCA-0
ZM-FCB-0
ZM-HCA
ZM-HCB
ZM-PV-0
ZM-PV-O
ZM-SA
ZM-SA-0
ZM-SA-O
ZM-SA-OX15
ZM-SF
ZM-SP