Brooks SLA5851S 质量流量计

Brooks SLA5851S 质量流量计

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2022-04-03 22:10:01
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西安欧润凯机电科技有限公司

西安欧润凯机电科技有限公司

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产品简介

Brooks SLA5851S 质量流量计关键应用：化学品与石化分析和试验过程；实验室和分析系统；生命科学实验室；薄膜气相沉积；热处理、切割等其他热过程；真空应用。

详细介绍

关键应用

 

 

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20- FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS

 

Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20- FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

模拟通讯

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

 

数字通讯 DeviceNet™
EtherCAT®
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485

 
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