性能

流量范围-满量程容量

.003 - 2500 slpm

精度

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20- FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS

Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20- FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

重复性

0.20% SP

线性

Included in accuracy

响应时间-常闭

0.003 - 100 slpm: <1 second

100 - 2500 slpm: <3 seconds

多气体多量程

Standard

大压力

.003-200 slpm: 1500 psi/103 bar

100 - 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

控制范围

1-50 slpm: 100:1 Turndown for F.S.

50-2500 lpm: 50:1 Turndown for F.S.

零点稳定性

< 0.2% F.S. per year

温度系数

Zero: <0.05% of F.S per oC

Span: <0.1% of S.P. per oC

压力系数

0.03% per psi (0-200 psi N2)

灵敏度

<0.2% F.S. maximum deviation from specified accuracy after re-zeroing

等级

大温度

65oC

压差范围

Controllers

.003 - 50 lpm: 5 psi / 0.35 bar

50 - 100 lpm: 10 psi / 0.69 bar

500 lpm: 7.5 psi / 0.52 bar

1000 lpm: 14.5 psi / 1.00 bar

2500 lpm: 35.0 psi / 2.41 bar

漏率

1x10-9 atm cc/sec He

机械

密封材料

Elastomer Seal

接液材料

316L Stainless Steel

High Alloy Stainless Steel

Viton® Fluoroelastomers

Buna-N

Kalrez®

Teflon®/Kalrez®

EPDM

阀门

Normally Closed

Normally Open

Meter (no valve)

诊断

诊断能力

Available

状态灯

MFC Health, Network Status

报警

Sensor Output

Control Valve Output

Over Temperature

Power Surge/Sag

Network Interruption

诊断/服务端口

RS485 via 2.5mm jack

电气

模拟通讯

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

数字通讯

DeviceNet™
EtherCAT®
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485 

电气连接

DeviceNet™: 1xM12 with threaded coupling nut (B)

EtherCAT®, EtherNet/IP™: 1x5-pin M8 with threaded coupling nut/2xRJ45

Profibus®: 1x15-pin Male Sub-D/1x9-pin female Sub-D

RS485: 1 x 15-pin Male Sub-D, (A)

电源-功耗

Analog / Profibus® / RS-485

Valve Orifice > 0.032": 8 Watts

Valve Orifice ≤ 0.032": 5 Watts

Without Valve: 2 Watts

DeviceNet™ / EtherNet/IP™

Valve Orifice > 0.032": 10 Watts

Valve Orifice ≤ 0.032":  7 Watts

Without Valve: 4 Watts (DeviceNet™), 3 Watts (EtherNet/IP™)

EtherCAT®

Valve Orifice > 0.032": 8.5 Watts

Valve Orifice ≤ 0.032": 5.5 Watts

Without Valve: 2.5 Watts

承诺

认证和批准

ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU

UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

KOSHA: Ex nA IIC T4

符合环保要求

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

大小

Medium